在氣體面板、氣體柜和任何需要超純氣體進行晶片加工的地方提供卓越的顆粒過濾。緊湊的裝置減少了整個氣箱的占地面積，節(jié)省了寶貴的設備空間聚四氟乙烯膜提供了高效率的過濾，提高了產品產量低壓降降低了低蒸汽壓氣體中的冷凝風險與所有種類的半導體工藝氣體具有極好的兼容性，可與惰性和活性氣體一起使用，包括臭氧
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| PART NUMBER |
FITTING SIZE AND TYPE |
LENGTH |
| WG2F02JJ2 |
1/4" Butt weld tube |
133.4 mm (5.25") |
| WG2F02JJ4 |
1/2" Butt weld tube |
133.4 mm (5.25") |
| WG2F02PS1 |
1/4" compression seal (compatible with Swagelok fitting) male inlet/outlet |
115.5 mm (4.55") |
| WG2F02RR2 |
1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet |
127.0 mm (5.00") |
| WG2F02RR4 |
1/2" Gasket seal (compatible with VCR fitting) male inlet/outlet |
133.4 mm (5.25") |
| WG2F32PS1 |
3/8" Compression seal (compatible with Swagelok fitting) male inlet/outlet |
119.3 mm (4.70") |